Multi-mode noise analysis of cantilevers for scanning probe microscopy

by: MV Salapaka, HS Bergh, J Lai, A Majumdar, E Mcfarland

Journal of Applied Physics, Vol. 81, No. 6. (1997), pp. 2480-2487.

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Abstract

A multi-mode analysis of micro-cantilever dynamics is presented. We derive the power spectral density of the cantilever displacement due to a thermal noise source and predict the cantilevers's fundamental resonant frequency and higher harmonics. The first mode in the multi-mode model is equivalent to the traditional single-mode model. Experimental results obtained with a silicon nitride cantilever at 300 K are in excellent qualitative agreement with the multi-mode model. The multi-mode model may be used to obtain accurate values of the cantilever properties such as the elastic modulus, effective mass, thickness and moment of inertia. ©1997 American Institute of Physics.

@article{citeulike:623933, abstract = {A multi-mode analysis of micro-cantilever dynamics is presented. We derive the power spectral density of the cantilever displacement due to a thermal noise source and predict the cantilevers's fundamental resonant frequency and higher harmonics. The first mode in the multi-mode model is equivalent to the traditional single-mode model. Experimental results obtained with a silicon nitride cantilever at 300 K are in excellent qualitative agreement with the multi-mode model. The multi-mode model may be used to obtain accurate values of the cantilever properties such as the elastic modulus, effective mass, thickness and moment of inertia. \©1997 American Institute of Physics.}, author = {Salapaka, M. V. and Bergh, H. S. and Lai, J. and Majumdar, A. and Mcfarland, E. }, citeulike-article-id = {623933}, doi = {http://dx.doi.org/10.1063/1.363955}, journal = {Journal of Applied Physics}, keywords = {cantilevers, noise}, number = {6}, pages = {2480--2487}, posted-at = {2006-05-11 22:41:32}, priority = {2}, publisher = {AIP}, title = {Multi-mode noise analysis of cantilevers for scanning probe microscopy}, url = {http://dx.doi.org/10.1063/1.363955}, volume = {81}, year = {1997} }

RIS record

TY - JOUR ID - citeulike:623933 L3 - citeulike-article-id:623933 TI - Multi-mode noise analysis of cantilevers for scanning probe microscopy JF - Journal of Applied Physics VL - 81 IS - 6 SP - 2480 EP - 2487 PB - AIP N2 - A multi-mode analysis of micro-cantilever dynamics is presented. We derive the power spectral density of the cantilever displacement due to a thermal noise source and predict the cantilevers's fundamental resonant frequency and higher harmonics. The first mode in the multi-mode model is equivalent to the traditional single-mode model. Experimental results obtained with a silicon nitride cantilever at 300 K are in excellent qualitative agreement with the multi-mode model. The multi-mode model may be used to obtain accurate values of the cantilever properties such as the elastic modulus, effective mass, thickness and moment of inertia. ©1997 American Institute of Physics. KW - cantilevers KW - noise AU - Salapaka, MV AU - Bergh, HS AU - Lai, J AU - Majumdar, A AU - Mcfarland, E PY - 1997/// UR - http://dx.doi.org/10.1063/1.363955 ER -

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